Part of Springer Nature. Article  Kimerling, Appl. These operate in the infrared, most commonly at the 1.55 micrometre wavelength used by most fiber optic telecommunication systems. Our previous work using polySi strip waveguides, showed an optical transmission loss of 15 dB/cm at λ=1.55 µm, which is a communication wavelength of choice in optical fibers because it represents an absorption minimum. Learn more about Institutional subscriptions. %���� ���Ã_~b�Ã��Ã�s�8��]�px.b��,��%"�S�sϽ���m�d��)ן��6�œ�6�'S��.�~x�^��Ã]�Y��D��Up ��h]塔. Hitherto, in decreasing loss from 77 dB/cm to 15 dB/cm, we had minimized loss from surface scattering by improving the film surface morphology, and decreased bulk absorption with hydrogen passivation. Bernstein, S. Qin, C. Chan, and T.-J. <> Soc., 1994), p. 486. In some commercial cameras, the wavelength response of silicon … &�8 _����Z|���������������� endstream endobj 253 0 obj << /Type /XObject /Subtype /Image /Name /im239 /Filter /CCITTFaxDecode /Width 2400 /Height 109 /BitsPerComponent 1 /Decode [ 1 0 ] /ColorSpace /DeviceGray /Length 1201 /DecodeParms << /K -1 /Columns 2400 >> >> stream It also contains information on the reflection, transmission, and absorption percentages at different thickness. L.M. The silicon is usually patterned with sub-micrometre precision, into microphotonic components. Together, these methods have resulted in the lowest measured loss value of 9 dB/cm at λ=1.55 µm. Optical transmission losses in polycrystalline silicon strip waveguides: Effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength. A good rule of thumb is that the damage threshold has a linear relationship with wavelength such that as you move to shorter wavelengths, the damage threshold decreases (i.e., a LIDT of 10 W/cm at 1310 nm scales to 5 W/cm at 655 nm): While this rule of thumb provides a general trend, it is not a quantitative analysis of LIDT vs wavelength. Fig. N. Yamauchi and R. Reif, J. Appl. Black, A.M. Agarwal, and L.C. 75, 3235 (1994). 3 0 obj Phys. Lim, “Silicon Electro-Optic Modulator Based on Waveguide Coupling at 1=1.55 mm” (Bachelors thesis, MIT, 1994). In this paper we report a further reduction in the residual bulk loss from 15 dB/cm to 9 dB/cm. PubMed Google Scholar, Liao, L., Lim, D.R., Agarwal, A.M. et al. 2 0 obj Lattice absorption, as well as Oxygen absorption, depends One major challenge with using this material system, however, is its insertion loss. endobj coefficient of silicon for different photon energies and wavelengths. Annealing in an oxygen ambient is not recommended because it always increases transmission loss. D.R. 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